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Beam quality: Beams of 6Li, 9Be and 12C ions with intensities between 50 and 200 nA. Target: Self-supporting natural silicon targets with thicknesses from 50 to 100 μg/cm2. Data obtained: author graph (digitized with GSYS 2.4)The measurements were performed at the tandem Van de Graaff accelerator of the ETH Ziirich. The targets showed a slight contamination of oxygen and a considerable build-up of the carbon content during the measurement.